Title:
CLAENING DEVICE FOR RETICLE CONTAINING CASSETTE
Document Type and Number:
Japanese Patent JPS611013
Kind Code:
A
Abstract:
PURPOSE:To improve the good product rate of semiconductor elements by arranging a dipping cleaning tank for dipping a cassette to clean it, a shower cleaning tank for washing the adhered cleanser, and drying tank on a conveying path of the cassette, and providing a cassette conveying mechanism therebetween. CONSTITUTION:A cleaning unit body is composed of a conveying mechanism 8 between tanks, a solution storage unit 10, a containing box 11 and a drive control board 12, and a reticle containing cassette 2 is contained in the box 11. Then, the cassette 2 is fed to a dipping solution cleaning tank 3 to remove contaminants adhered by a supersonic wave generator 9, and the adhered cleanser is washed by a shower cleaning tank 5. Then, the cassette 2 is fed to a drying tank 7 having an air nozzle 6 to blow dry air to dry the cassette 2. The mechanism 8 for feeding between the tanks is composed to elevationally and laterally move to effectively clean the cassette 2.
Inventors:
ISHITANI SHIGERU
Application Number:
JP12146084A
Publication Date:
January 07, 1986
Filing Date:
June 13, 1984
Export Citation:
Assignee:
NIPPON ELECTRIC CO
International Classes:
H01L21/677; H01L21/02; (IPC1-7): H01L21/02
Attorney, Agent or Firm:
Sugano Naka
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