Title:
【考案の名称】グロ-放電ゲ-ジ
Document Type and Number:
Japanese Patent JPS6093261
Kind Code:
U
Inventors:
Saburo Shimoi
Application Number:
JP18594883U
Publication Date:
June 25, 1985
Filing Date:
November 30, 1983
Export Citation:
International Classes:
H01J37/32; C23C16/50; G01L21/34; H01L21/205; (IPC1-7): H01J37/32; C23C16/50; G01L21/34; H01L21/205