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Title:
HUMIDITY SENSOR
Document Type and Number:
Japanese Patent JPS5932857
Kind Code:
A
Abstract:

PURPOSE: To obtain a humidity sensor which facilitates extraction of signal changes with a characteristic of allowing capacitance to vary almost linearly on a logarithmic graph by using cyanoethylcellulose for the humidity-sensitive film.

CONSTITUTION: A cyanoethylcellulose flake with a substitution degree of 2 and 5 and a polymerization degree of 250 is dissolved into dimethylformaldehyde to be a 30% solution and 10wt% of BaTiO3 is added to the solution with respect to ethylcellulose flake and kneaded to form a paste, which is applied on a substrate side electrode 1 to form a humidity-sensitive film 2 while an electrode 3 is formed to make a humidity-sensitive sensor. The cyanoethylcellulose is obtained by reacting cellulose upon excessive acrylonitrile under an alkali catalyst. When the substitution degree of the cyanoethyl group is below 2.0, no sufficient dielectric can be obtained and when it exceeds 2.8, the hygroscopicity is so poor as to achieve no sufficient humidity sensitivity.


Inventors:
MASUO TASUKU
Application Number:
JP14289182A
Publication Date:
February 22, 1984
Filing Date:
August 17, 1982
Export Citation:
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Assignee:
MURATA MANUFACTURING CO
International Classes:
G01N27/22; G01N27/12; (IPC1-7): G01N25/64; G01N27/22
Domestic Patent References:
JPS57141546A1982-09-01