Title:
VARIABLE ELECTROSTATIC CAPACITY PRESSURE TRANSDUCER HAVING NUMBER OF CAVITY
Document Type and Number:
Japanese Patent JPS5835433
Kind Code:
A
Abstract:
A semiconductor plate (10), e.g. silicon, is etched from both sides to form a cluster of cavities (12) connected by narrow grooves (14). The plate (10) is sandwiched between and electrostatically bonded to two insulating plates (16), e.g. of borosilicate glass, carrying electrodes (18) connected by tracks (19), in correspondence with the cavities (12) and grooves (14). Connections are made via plated-through holes (24) and the differential pressure communicated through the holes and deflecting the thinned diaphragm areas of the plate (10) is measured by the differential capacitance between the electrode (18,19) and the plate (10). The provision of a plurality of diaphragm areas enables higher differential pressures to be measured.
Inventors:
POORU JIYASUTASU FUROODO
Application Number:
JP12776182A
Publication Date:
March 02, 1983
Filing Date:
July 23, 1982
Export Citation:
Assignee:
LEEDS & NORTHRUP CO
International Classes:
G01L9/12; G01L9/00; (IPC1-7): G01L9/12
Attorney, Agent or Firm:
Toshinori Karami