PURPOSE: To attain the positioning of patterns with a simple constitution by picturizing a pattern in a prescribed area of an object to be detected and deciding its pattern shearing on the basis of the design information corresponding to the pattern to control the movement of the object to be detected.
CONSTITUTION: A binary picture of a pattern of an object 1 to be detected mounted on a stage 14 is formed on a frame memory 130 through an industrial TV2 and a binary coding circuit 3. A computer 10 calculates the horizontal and vertical edges of the binary pattern picture in a prescribed area and the binary designed information recorded in a magnetic tape 9 or the like correspondingly to said binary pattern picture and the difference corresponding to the shearing extent of both the patterns. The offset of the stage 14 is automatically compensated through a driving means 13 on the basis of the calculated difference and rotating errors are also compensated in the same manner. Consequently it is unnecessary to put a positioning mark on the object to be detected and the positioning for pattern detection can be attained with a simple constitution.
HAZAMA JIYUNJI
KAWAHARA ATSUSHI
HATA KAZUNARI
FUJII NORIO
| JPS5242790A | 1977-04-02 | |||
| JPS5225575A | 1977-02-25 | |||
| JPS51148451A | 1976-12-20 |
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