PURPOSE: To easily detect the inclination angle of the surface of an object in a non-destructive state, by irradiating a rotating object with electron beam and detecting the inclination angle of the surface of the object from the rotary angle of the object corresponding to the min. value of a secondary electron signal generated at the time of irradiation.
CONSTITUTION: A specimen stage 14 is allowed to rotate to the direction shown by the arrow so that the incident angle of electron beam to the inclination direction to be detected of the surface of a specimen 2 is made variable by a specimen stage control apparatus 15 and the average level of secondary electron signals, which are generated when electron beam 1 is allowed to scan on the specimen corresponding to the rotation of said stage by a deflection signal generating circuit 16, is detected by an average level detecting circuit 17 while the rotary angle of the specimen stage 14 when said average level takes a min. value is extracted by an inclination detecting circuit 18. This rotary angle is set to the inclination angle of the surface of the specimen 2 in the inclination direction to be detected. By this mechanism, the inclination angle of the surface of the specimen can be easily detected in a non-destructive state.
KUJI TOMOHIRO
SHIGEMURA TAKASHI
YOSHIMURA KAZUSHI
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