PURPOSE: To provide a titled device which permits removal of the fine dust, etc. stuck on the substrates, etc. in a vacuum chamber prior to ion plating, by providing gas shower nozzles which open toward an electrode for supporting the substrates provided in an ion plating device.

CONSTITUTION: In the stage of mounting substrates 2 to a cathode 3, gas shower nozzles 15 are held in the down position. Watch cases made of stainless steel are adapted for the substrates 2, and Ti is provided in an evaporating source 10. In the stage of evacuating roughly the inside of a vacuum chamber 1 through an evacuation port 8, a driving part 21 for a movable cover is operated upon starting of the rough evacuation to raise a movable cover 16 to a solid line position. The nozzles 15 are moved upward to the solid line position in succession. The nozzles 15 are rotated in this stage by means of two driving screws 18 which are rotated with pulleys and belts as transmission mechanisms. The degree of vacuum detected with a vacuum gauge 11 is further converted with a conversion part 12 and a control part 13 to the open or close signal of a valve 14. The valve 14 is opened in accordance with said signal to blow out gaseous N2. At the same instant, right and left motors 22 are rotated to oscillate the nozzles 15 at a specified cycle, thereby removing the fine dust, and various powders stuck on the substrates 2.