PURPOSE: To connect an oscillator electrode and an external electrode easily by making an insulation film on the surface of the oscillator, forming a through hole optically, and constituting the electrode on the surface of the insulation film for wiring.

CONSTITUTION: A photosensitive insulation coated film 17 is made on the surface of the oscillator 15, light 14 is irradiated by covering the negative-type resist 18, and the through hole is formed at a section 19. Wiring is formed from the external electrode 20 to the through hole 21 by evaporation, etc., and connection with the oscillator electrode is executed by the through hole. The oscillator electrode of the oscillator which has the complicated shape, and the external electrode can be easily connected without giving any propagation trouble to sound wave.