Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
SURFACE ACOUSTIC WAVE ELEMENT
Document Type and Number:
Japanese Patent JPS6090416
Kind Code:
A
Abstract:

PURPOSE: To obtain a well shielded surface acoustic wave element by providing a conductor layer over the entire surface of a substrate except at electrode bonding parts of the surface acoustic wave element with an insulating film interposed.

CONSTITUTION: An inter-digital type input electrode 2 and an output electrode 3 are provided on the piezoelectric substrate 1, the insulating film 7 such as an SiO2 and an Al2O3 film is formed over the entire surface of the substrate by vacuum vapor deposition, sputtering, or VCD, and metal or aluminum for the conductor layer 5 is adhered thereupon by vacuum vapor deposition or sputtering. The conductor layer 5 covers the whole substrate except electrode bonding parts and the electrode 2 and conductor layer 5 are insulated by the insulating film 7, so the surface acoustic wave which is strong in terms of structure and has shield effect improved greatly is obtained.


Inventors:
MOCHIZUKI MASAMI
SUZUKI SHINICHI
Application Number:
JP19849583A
Publication Date:
May 21, 1985
Filing Date:
October 24, 1983
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
PIONEER ELECTRONIC CORP
International Classes:
H03H9/25; H03H3/08; (IPC1-7): H03H9/25



 
Previous Patent: Optical module

Next Patent: SURFACE ACOUSTIC WAVE ELEMENT