PURPOSE: To simplify operation and cell construction and prevent leakage, by using a molten salt bath only on the anode side in carrying out the ion exchange with a box cell having a sample glass as a bottom, and replacing the metallic electrode molten salt bath and metallic electrode on the cathode side with a metallic film.
CONSTITUTION: A sputtering film of Ti on one side of a sample glass 2 is etched with phosphoric acid to form a mask 4 for manufacturing plate microlens, and a metallic thin film 8, e.g. silver or Al, is formed on the rear side of the sample glass 2 by the vapor deposition or sputtering method. The resultant glass 2 is then bonded to a frame 3, e.g. made of glass by the fusing or bonding method, with the mask surface 4 outside using a heat-resistant inorganic adhesive. The metallic film electrode 8 is connected to a platinum plate 7 with an electrically conductive resin 9, and a platinum wire 10 is fixed on the frame 3 with a bonding part 11 to keep the above-mentioned connection. The resultant cell is then placed on a porcelain boat 1 containing a salt 6 consisting of a sulfate of T1, Zn or K, etc. and a platinum electrode 5 and heated under an Ar stream to melt the salt 6. After applying a DC voltage across the electrodes 5 and 8, the cell is taken out of the molten salt bath and annealed.
OKAMOTO NORIHISA
MATSUO MASATAKE
