PURPOSE: To realize effective incidence of radiation from a source of the radiation by evacuating the optical path from the source to optical window on a reaction chamber or by constituting the optical path with gas having no absorptivity for the radiation.
CONSTITUTION: An optical window 3 capable of transmitting radiation having selected wavelength and/or within a specified wavelength region is provided to a reaction chamber 10 which can be held in the gas-tight state in a device for photochemically activating specified gas and performing specified tratment on the surface of a substrate 9, and a charging device 6 and exhaust device 7 for the gas are provided to the reaction chamber 10. Further, a source 2 for generating radiation with specified wavelength and/or within specified wavelength region, and if necessary a means for selecting the wavelength are provided, and a vacuum chamber or a gas-tight chamber 1 for filling selected gas is also provided between the source 2 and the reaction chamber 10. Namely, the optical path between the source and the optical window 3 is evacuated or constituted with gas having no absorptivity for radiation to enable efficient incidence of radiation from the source into the reaction chamber.
HIRAGA TAKASHI
NAGASAKA MICHIO
| JPS4737008U | 1972-12-23 |