PURPOSE: To improve performance and productivity satisfactorily when a ferromagnetic layer is formed, by setting the angle of incidence of an electron beam to the vaporizing surface of ferromagnetic material to ≤45° and the angle of incidence of vapor to a high polymer substrate to ≥40° when directing the vapor to the substrate in movement.

CONSTITUTION: When the substrate 1 moves along a rotating support body 3, the ferromagnetic layer is formed on the substrate 1, but vapor flow radiated from the molten ferromagnetic material in a vapor deposition source container 5 has an angle distribution; thin-film formation starts with 90° incidence and the speed of the vapor deposition increases to a maximum speed (θmax) as the angle of incidence decreases, and then decreases to the contrary; and the vapor flow is cut off with a mask 7 and the formation is completed. When the θmax exceeds 40°, a reflected electron is injected into a high polymer molding within a condition range by setting the angle θe of incidence to ≤45°, the effect that electrostatic attracting force with the grounded rotating support body is enhanced by an electrostatic field based upon a spatial charge distribution, cooling effect becomes more effectively to suppress thermal deterioration of the substrate, expecting the improvement of the productivity.