PURPOSE: To economically form the baking pattern of ultra-fine particles to the surface of a substrate with high efficiency, by allowing spot light to run at the predetermined place on the surface of the substrate to activate the surface thereof prior to spraying ultra-fine particles.

CONSTITUTION: Only a place 2 is irradiated with condensed spot light 3 such as ultraviolet rays according to a predetermined pattern by an irradiation apparatus 4 and the enhancement of the adhesiveness of ultra-fine particles to said place 2 is brought about by the activation of said place 2, that is, surface adsorption or exciting thereof. Therefore, the baking pattern of ultra-fine particles can be economically formed to the surface of the substrate with high efficiency.