Title:
EVALUATING METHOD FOR CORROSION OF METAL
Document Type and Number:
Japanese Patent JPS5891655
Kind Code:
A
Abstract:
PURPOSE:To evaluate the corrosion of a metal pattern in a short time under the state of a wafer by measuring the curve of reflectivity of a sample and measuring and evaluating the degree of corrosion according to difference between reflectivity at 400nm wavelength and reflectivity at 500nm wavelength. CONSTITUTION:The sample (a) to be evaluated is tested by a pressure cooker test (PCT) (b) first. The curve of reflectivity of the sample is measured (c). DELTAR=(Rlambda1-Rlambda2)/Rlambda2 is calculated by Rlambda1 reflectivity at lambda1 wavelength and Rlambda2 reflectivity at lambda2 wavelength from the curve of reflectivity. The degree of corrosion is evaluated (d) according to the magnitude of the DELTAR. lambda1 Wavelength is 400nm and lambda2 wavelength is 500nm. Consequently, the corrosion of the metal pattern in an IC is evaluated in a short time under the state of the wafer.
Inventors:
MADOKORO SHIYOUJI
Application Number:
JP18907781A
Publication Date:
May 31, 1983
Filing Date:
November 27, 1981
Export Citation:
Assignee:
OKI ELECTRIC IND CO LTD
International Classes:
G01N21/27; H01L21/302; H01L21/3065; H01L21/66; (IPC1-7): G01N21/00; H01L21/306
Attorney, Agent or Firm:
Hiroshi Kikuchi