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Patent Searching and Data


Title:
GLASS PLATE PACKAGE AND SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPH04103142
Kind Code:
A
Abstract:

PURPOSE: To simplify the manufacturing process of a semiconductor device and to realize easily a multi-product and small-lot production basis by a method wherein a plurality of package bases, which are respectively provided with a semiconductor element, wiring structures, bump electrodes or the like, are formed en bloc on a glass plate of a wafer size by a wafer process.

CONSTITUTION: Semiconductor elements 2, such as a resistor, a diode, a MOS structure and the like, are respectively formed at the formation regions of individual package bases 1a on a glass plate 1. Metal wiring structures 4 are respectively formed on these elements 2 via an interlayer insulating film 3. Parts, which correspond to the end parts and the like of the structures 4, of a passivation film 5 are opened and bump electrodes 6 are projected. Then, pads 8 formed on the surface of a semiconductor pellet 7 are bonded on the electrodes 6. The operation of the bonding is performed by a method wherein the pads 8 of the pellet 7 are respectively superposed on the elements 6, on the electrodes 6 is irradiated with a laser beam L which can penetrate the glass plate 1 from the rear of the plate 1 and the electrodes 6 are heated and melted.


Inventors:
YAMADA NOBUAKI
Application Number:
JP22191690A
Publication Date:
April 06, 1992
Filing Date:
August 23, 1990
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
H01L23/15; H01L21/56; H01L21/60; (IPC1-7): H01L21/56; H01L21/60; H01L23/15
Attorney, Agent or Firm:
Yamato Tsutsui