PURPOSE: To attain a Kerr hysteresis of a high angularity by forming a metallic conductive film on an insulating disc substrate consisting of transparent materials and applying a DC bias voltage to form a rare earth-transistion metallic amorphous thin film by the sputtering method.
CONSTITUTION: A disc substrate 1 where a metallic conductive film 7 is formed in a ring shape on the outside circumferential edge part is prepared and is attached to a substrate holder 3. The disc substrate 1 is so attached that a part of the metallic conductive film 7 is protruded from the substrate holder 3. A DC bias voltage is supplied from a DC constant voltage power source 5 through an upper electrode 4 and the substrate holder 4 to form a magnetic thin film on the side of the metallic conductive film 7 of the disc substrate by sputtering. Thereafter, a protective film is formed on the magnetic thin film. The bias sputting effect is produced as long as a part of the magnetic thin film formed by sputtering is laminated on the metallic conductive film 7, and the magnetic thin film having a high reproducibility and good magnetic characteristics is obtained.
KANEKO KATSUHIRO
TAKAYAMA SHINJI
SUGITA KEN
