Title:
【考案の名称】真空成膜装置
Document Type and Number:
Japanese Patent JPS6120561
Kind Code:
U
Inventors:
Kenji Furuta
Koji Yamaguchi
Koji Yamaguchi
Application Number:
JP10126184U
Publication Date:
February 06, 1986
Filing Date:
July 06, 1984
Export Citation:
International Classes:
C23C14/54; C23C16/50; G01L21/00; G01L21/30; (IPC1-7): C23C14/54; C23C16/50; G01L21/00
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