Title:
DEVICE FOR POSITIONING ORIENTATION FLAT
Document Type and Number:
Japanese Patent JPS6024032
Kind Code:
A
Abstract:
PURPOSE:To enable to accurately perform the positioning of the orientation flat by a method wherein the titled device is composed of a mean for mechanical positioning of the flat and a means for wafer carriage. CONSTITUTION:The wafer 10 having the orientation flat is placed on a carriage device 45 and then carried in a susceptor 43 after being carried in the direction of an arrow 32. The wafer 10 carried in the susceptor 43 is contained in the susceptor 43 in part of the outer peripheral edge. At this point, the wafer 10 is guided to the inner peripheral surface of the susceptor 43 and then pivoted until it agrees with the part 41 of orientation positioning. When the falt 11 agrees with the part 41, the wafer 10 comes inclined, with a roller 51 as its point of support, until it partly abuts against the belt 52 of a belt carrier 53. Rotation of this belt 52 in this state causes the wafer 10 to be carried outside the susceptor 43, and the abutment of the flat 11 against a wafer stoppr 54 makes the wafer to be stopped.
Inventors:
KAN YOSHIJI
KUDOU KATSUYOSHI
SORAOKA MINORU
KUDOU KATSUYOSHI
SORAOKA MINORU
Application Number:
JP13084183A
Publication Date:
February 06, 1985
Filing Date:
July 20, 1983
Export Citation:
Assignee:
HITACHI LTD
HITACHI SANKI ENG
HITACHI SANKI ENG
International Classes:
H01L21/677; H01L21/67; H01L21/68; (IPC1-7): H01L21/68
Attorney, Agent or Firm:
Katsuo Ogawa