PURPOSE: To eliminate an oversight of a minute defect by inputting a pattern data by a minute resolution, executing digitization consisting of plural points, collecting a part in the plural points to one point, and also detecting a partial point and a circumferential point, respectively.
CONSTITUTION: A pattern data which becomes an object is written in a primary memory M by 10μm resolution, points 1W16 are set as a pattern part of logic 1, and other part is set as a non-pattern part of logic "0". Points 1W4 of an area (a) of this data are collected to one point by AND and OR gates 15, 16, and the logic 1 of points 5W16 in the circumference of the area (a) is counted by a counting circuit 10. An output SUM of this circuit 10 is provided to the first and the second comparing circuits 11, 12, and in case of SUM ≥8, the pattern becomes the inside, a lacked pattern is emphasized, and in case of SUM≤4, the pattern becomes the outside, and a remaining pattern is emphasized. Also, at the time of a pattern boundary part, both of them are not emphasized by the second bit counting circuit 19 and the third comparing circuit 24, and a low resolution is outputted.
ANDOU MORITOSHI
KAKIGI GIICHI
