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Patent Searching and Data


Title:
PHOTOSENSITIVE COMPOSITION
Document Type and Number:
Japanese Patent JPS619644
Kind Code:
A
Abstract:

PURPOSE: To obtain a negative type radiation sensitive resist having high resolution and high dry etching resistance by adding a specified photosensitive aromatic azide compound and a polymer which is photochemically hardened or made insoluble in a solvent by the azide compound.

CONSTITUTION: A photosensitive composition is obtd. by adding the condensation product of equimolar amounts of an aromatic azide compound having an aldehyde group and pyrrole and a polymer which is photochemically hardened or made insoluble in a solvent by the condensation product. For example, the condensation product and the polymer such as polystyrene are dissolved in a solvent such as chlorobenzene, and the resulting photosensitive soln. is applied to a support and dried to form a photosensitive film. This film is exposed to radiation and developed with chlorobenzene. By the development, the unexposed part is dissolved and removed, and a fine pattern can be obtd. Thus, a negative type radiation sensitive resist having high resolution and high dry etching resistance is obtd. The resist is used as a photographic or copying material or a material for printing plates.


Inventors:
IRIE RIYOUTAROU
Application Number:
JP12928284A
Publication Date:
January 17, 1986
Filing Date:
June 25, 1984
Export Citation:
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Assignee:
HITACHI CHEMICAL CO LTD
International Classes:
G03F7/008; G03F7/012; G03F7/038; (IPC1-7): G03C1/71
Attorney, Agent or Firm:
Akio Takahashi