Title:
CLEANING BY SLOWLY FLOWING LIQUID AND EQUIPMENT OF THE SAME
Document Type and Number:
Japanese Patent JPS59121938
Kind Code:
A
Abstract:
PURPOSE:To reduce the frequency of the putting in and out and improve the cleansing effect by a method wherein the cleansing liquid in a cleansing bath is let flow slowly and a cleansed object is dipped into the cleansing liquid at its downstream and is cleansed while it is conveyed against the direction of the flow of the cleansing liquid and is pulled out of the liquid at its upstream. CONSTITUTION:The cleansing liquid L11 in a cleansing bath 11 is positively recovered and fed to a tank 13 by the operation of a pump 14 and, on the other hand, the cleansing liquid stored in the tank 13 is fed to the cleaning bath 11 through a filter 16 by the operation of another pump 15. The cleansing liquid is circulated while the surface of the liquid in the cleansing bath 11 is kept nearly stable. Floating foreign articles are transferred from right to left and the floating foreign articles near a liquid feeding inlet 11b are quickly removed. A cleansed object 10 is dipped near a liquid recovering outlet 11a or at the downstream of the flowing cleansing liquid and put on a conveyer 12 so that it is conveyed to the direction of an arrow mark A and is cleansed continuously until it reaches near the liquid feeding inlet 11b or the upstream of the flowing liquid.
Inventors:
USUDA KINYA
Application Number:
JP22805382A
Publication Date:
July 14, 1984
Filing Date:
December 28, 1982
Export Citation:
Assignee:
TOSHIBA KK
International Classes:
B08B3/02; H01L21/00; H01L21/304; (IPC1-7): B08B3/04
Attorney, Agent or Firm:
Kiyoshi Inomata