Title:
WAFER LOADING/UNLOADING APPARATUS
Document Type and Number:
Japanese Patent JPS5932149
Kind Code:
A
Abstract:
PURPOSE:To energy-save a wafer loading/unloading apparatus by providing a horizontally movable chuck at one side of an elevator of a wafer cassette, a rotatable chuck at the front side and a slide of a wafer holding boat at the lower side, and automatically feeding the wafer between the boats. CONSTITUTION:A rotary turret 3 is disposed at the upside of an elevator 4, cassette holding square holes 14 are opened at the positions corresponding to the elevator at the peripheral edge, and positioned by the holes 49 and pins 50. A holding plate 9 is raised, a plate 13 on the holes 14 are driven at 23 at the member 24 by raising slightly the plate 13 and a cassette 2 on the holes 14 to move it to the elevator 4. The elevator 4 then starts intermittently moves down, a vacuum chuck 5 is driven by a driver 30, a base plate SW is attracted and moved, the chuck 5 is engaged with a vacuum chuck 6 which is waiting in a horizontal state, thereby receiving the base plate SW. Then, the chuck 6 is rotated, holds the plate SW vertically, moves down it and transfers the plate onto a boat 7 on the horizontally movable base 8 waiting at the lower side. According to this structure, the plates may be sequentially efficiently shifted between the cassette boats.
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Inventors:
YAMAGUCHI SUSUMU
Application Number:
JP14315582A
Publication Date:
February 21, 1984
Filing Date:
August 18, 1982
Export Citation:
Assignee:
DAINAMITSUKU INTERNATIONAL KK
International Classes:
H01L21/677; H01L21/68; (IPC1-7): H01L21/68
Attorney, Agent or Firm:
Suzuki Seiji