Title:
APPARATUS FOR PRODUCING SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPS60148196
Kind Code:
A
Inventors:
HASEBE YUTAKA
Application Number:
JP432384A
Publication Date:
August 05, 1985
Filing Date:
January 13, 1984
Export Citation:
Assignee:
NIPPON ELECTRIC CO
International Classes:
H05K13/02; (IPC1-7): H05K13/02
Domestic Patent References:
| JPS52143478A | 1977-11-30 | |||
| JPS5448073A | 1979-04-16 | |||
| JPS57159048A | 1982-10-01 | |||
| JPS58168247A | 1983-10-04 | |||
| JPS56172943U | 1981-12-21 | |||
| JPS54108959U | 1979-07-31 | |||
| JPS5723297A | 1982-02-06 | |||
| JPS5031622A | 1975-03-28 |
Attorney, Agent or Firm:
Uchihara Shin