PURPOSE: To provide the titled mold, its surface coated with a thin film of TiC, TiN or TiCN having a specific thickness, applicable to a high-pressure efficient press molding, polishable to the degree of optical mirror, free from the tendency to weld with glass, and usable without polishing.
CONSTITUTION: A substrate material such as WC steel is machined in the form of a mold for a biconcave lens, and the surface contacting with glass is polished with diamond paste to the surface roughness of ≤180 Rmax and a surface precision of ≤2 Newton fringes. The obtained mold 3 is put into a vacuum chamber 1, and the chamber is evacuated (10) to ≤1×10-6 Torr and charged with Ar gas at a pressure of about 2×10-2 Torr. A negative potential of 1.5kV is applied to the mold 1 by the discharging source 7 to clean the surface of the mold 3 by the glow discharge. The chamber 1 is evacuated again, and substituted with N2 gas of 4×10-4 Torr pressure. The heater 5 is electrified to generate Ti vapor, a negative potential of 1kV is applied to the mold 3, and the shutter 9 is opened to effect the deposition of TiC on the surface of the mold 3 to a thickness of 0.5W10μm to obtain the objective mold.
IZUMITANI TETSUO
JPS5659641A | 1981-05-23 | |||
JP38008824A | ||||
JPS5771829A | 1982-05-04 | |||
JPS59123629A | 1984-07-17 | |||
JPS59121126A | 1984-07-13 |