Title:
MANUFACTURE OF SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPS59144126
Kind Code:
A
Abstract:
PURPOSE:To realize quick and highly accurate alignment by forming a pattern in the area near the circumference of wafer and vacuum-depositing electrode metal by covering this pattern with the sawl part of planetarium at the time of vacuum-depsiting electrode metal. CONSTITUTION:An alignment pattern 11 is formed in the area near the circumference in the right and left of a semiconductor wafer 10. A planetarium 13 has a hole 14, a stepped part 15 where the wafer 10 is placed by positioning around the hole 14 and a pawl part 16 which is extended toward the center of hole 14 from two areas of right and left sides of such stepped part 15. When the wafer 10 is placed by positioning on the stepped part 15, the pawl part 16 covers the pattern 11. Under this condition, an electrode metal such as aluminum is vacuum-deposited from the lower side. Next, a photo resist film is coated on the wafer 10 and alignment is carried out by confirming the pattern 11 through such film.
Inventors:
YAMAMOTO KIICHIROU
Application Number:
JP1852083A
Publication Date:
August 18, 1984
Filing Date:
February 07, 1983
Export Citation:
Assignee:
NIPPON DENKI HOME ELECTRONICS
International Classes:
G03F9/00; H01L21/027; (IPC1-7): H01L21/30; G03F9/00
Attorney, Agent or Firm:
Kansai NEC Corporation