PURPOSE: To improve the characteristics of a magnetic body by interposing a shielding film between each conductor coil and an interlaminar insulating film to reduce the surface unevenness of the insulating film due to difference in level of the coil and to make the thickness of the insulating film uniform.
CONSTITUTION: A lower protective film 7 is formed on a substrate 8, a lower magnetic film 6 and a gap material 5 are successively laminated on the film 7, and an interlaminar insulating film 3 for insulating conductor coils 4 is formed. An upper magnetic film 2 is then formed on the film 3 to obtain a magnetic thin film head. The head is protected by coating the film 2 with an upper protective film 1, and a shielding film 9 is formed on each of the coils 4. Thus, the extent of reduction in the thickness of an org. polyimide resin film on the coil 4 due to oxygen plasma asher can be reduced, so the insulating film 3 can be formed as a film of 1.5W3.0μm desired thickness.
SUZUKI SABUROU
TOGAWA EISEI
NAKAJIMA HIROYASU
KUWAZUKA SHIYUNICHIROU
