Title:
ALIGMENT AND EXPOSURE OF SHEET SUBSTRATE
Document Type and Number:
Japanese Patent JPS592049
Kind Code:
A
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Inventors:
ROBAATO BAANAADO HEIAATO
Application Number:
JP10297183A
Publication Date:
January 07, 1984
Filing Date:
June 10, 1983
Export Citation:
Assignee:
DU PONT
International Classes:
G03B27/02; B32B37/24; G03F7/16; G03F7/20; H05K3/00; H05K3/02; (IPC1-7): G03B27/18; G03F7/20
Domestic Patent References:
JPS5119604A | 1976-02-17 | |||
JPS58102968A | 1983-06-18 | |||
JPS58102969A | 1983-06-18 | |||
JPS58102972A | 1983-06-18 |
Attorney, Agent or Firm:
Tatsuo Sato (2 outside)
Next Patent: JPS592050