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Title:
EMITTING METHOD FOR LASER BEAM
Document Type and Number:
Japanese Patent JPS5919332
Kind Code:
A
Abstract:
PURPOSE:To efficiently emit a laser beam with uniform emitting energy density with a simple structure by emitting the beam to the center of a tetrahedron prism of pyramid shape, refracting the beam toward a central axis, and recombining the beam on the emitted surface. CONSTITUTION:A laser beam 1 is emitted to the center of a tetrahedron prism 5 of pyramid shape. The parts 1A,... of the beam 1 are refracted toward the central axis 6, and superposed on the emitted surface 4. As a result, the beam 1 is emitted in the uniform emitting energy density to the region of the tetrahedron which has l of one side. The side is varied by adjusting the distance L between the prism 5 and the surface 4, thereby obtaining the optimum emitting condition.

Inventors:
KAWAMURA YOSHIYUKI
TOYODA KOUICHI
NANBA SUSUMU
Application Number:
JP12852382A
Publication Date:
January 31, 1984
Filing Date:
July 23, 1982
Export Citation:
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Assignee:
RIKAGAKU KENKYUSHO
International Classes:
B23K26/06; B23K26/073; H01L21/268; H01S3/101; H01S5/14; (IPC1-7): B23K26/00; H01S3/00
Domestic Patent References:
JPS5587119A1980-07-01
Attorney, Agent or Firm:
Minoru Nakamura