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Title:
FORMATION OF IMAGE SENSOR ELEMENT
Document Type and Number:
Japanese Patent JPS5851562
Kind Code:
A
Abstract:

PURPOSE: To prevent the decrease in the contrast of an image sensor by employing a low resistance metallic film for a group electrode and a thin film resistance for a selecting electrode, thereby reducing the input resistance.

CONSTITUTION: A photoconductive film 6 a group electrode 7 and a selecting electrode 8 are formed as an operating unit. A plurality of elements are formed in a main scanning direction, a photconductive film 6 is formed as the operating unit of the elements at its longitudinal direction in a sub scanning direction, and the electrode 7 is formed with two as a set at the center of thin metallic films such as NiCr-Au (having approx. 3,000 thick). The electrode 8 is formed at both sides of the film 6 at the thin film resistor (having approx. 300 thick) such as NiCr, Cr-SiO, Cr-Si or the like. As a result, the group electrode 7 of the one electrode of the element become substantially 0 ohm, and only one side selecting electrode 8 is formed of the resistance film, and the input resistance accordingly becomes small.


Inventors:
SATOU MASUJI
YAMADA FUMIAKI
NAKA TOSHIAKI
Application Number:
JP14877581A
Publication Date:
March 26, 1983
Filing Date:
September 22, 1981
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
H01L27/146; H04N1/028; (IPC1-7): H01L27/14; H04N1/028
Attorney, Agent or Firm:
Aoki Akira



 
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