Title:
【考案の名称】冷却筒付き加熱炉
Document Type and Number:
Japanese Patent JPS5850236
Kind Code:
Y2
Inventors:
Nakano Shoki
Application Number:
JP16249379U
Publication Date:
November 15, 1983
Filing Date:
November 23, 1979
Export Citation:
Assignee:
MITSUBISHI HEAVY INDUSTRIES,LTD.
International Classes:
F27D9/00; F27B5/00; F27B17/00; F27B17/02; F27D11/02; H01L21/22; (IPC1-7): F27B5/00; F27B17/00; F27D9/00; F27D11/02
Attorney, Agent or Firm:
Yu Shirai