Title:
INSPECTING DEVICE FOR SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JPS60158639
Kind Code:
A
Abstract:
PURPOSE:To select defectives, which are incomplete in pressure welding, among semiconductor chips with superior precision by a method wherein one-shot current (rectangular pulse current) having a constant pulse width is conducted to the forward direction of the semiconductor device and a fluctuation component of the forward voltage drop at this time is measured and whether the semiconductor device is a defective or a non-defective is decided. CONSTITUTION:Rectangular pulse current (for example, current of a pulse width of 10msec and a pulse height of 5A) is conducted to a double-heat sink diode 22, which is used as a sample, from a rectangular pulse power source 20 such as a pulse generator, which generates rectangular pulse current (one-shot current), and a voltage waveform between both ends of the diode 22 (hereinafter called as DHD) is measured by a measuring unit 24 including a digital voltmeter, by which a fluctuation component of the forward voltage drop of the DHD is measured, and so forth. A magnitude between the reference value VR for the fluctuation component of the forward voltage drop and the actual fluctuation component DELTAVF is compared in a decision unit 26 and whether a DHD24, which is a sample, is a non-defective or a defective is decided according to the relation of magnitude.
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Inventors:
OOGANE KUNISUKE
MISAWA MICHIHIRO
TAN MAKOTO
MISAWA MICHIHIRO
TAN MAKOTO
Application Number:
JP1367184A
Publication Date:
August 20, 1985
Filing Date:
January 27, 1984
Export Citation:
Assignee:
HITACHI LTD
International Classes:
G01R31/26; H01L21/66; (IPC1-7): H01L21/66
Domestic Patent References:
| JPS5128387A | 1976-03-10 |
Attorney, Agent or Firm:
Tatsuyuki Unuma