PURPOSE: To form easily various kinds of hard films on a substrate by using a laser vapor deposition installation by using graphite, carbon, metal, alloy, metallic compd., ceramics, etc. for forming a rotating body on which convergent laser light is irradiated.
CONSTITUTION: Convergent laser light is irradiated on a rotating body under rotation in a vessel and the particles evaporating from the rotating body are deposited on a substrate, thereby forming a hard film thereon. The rotating body is made of a mixture composed of ≥2 different materials selected from graphite, carbon, metal, alloy, metallic compd. and ceramics. The construction thereof is columnar, cylindrical body, conical body, disk body, and ring body. If such rotating body is formed of a powder mixture composed of, for example, metallic titanium and carbon, the hard film of titanium carbide can be formed on the substrate. The dense, strong and hard film is formed on the substrate with good adhesion at a high deposition rate by the above-mentioned method.
YASUNAGA NOBUO
TARUMI NOBORU
OBARA AKIRA
IKEDA MASAYUKI
SATOU JIYUNICHI
SADAHIRO TAKESHI
SHOWA DENKO KK
TOSHIBA TUNGALOY CO LTD
| JPS57158377A | 1982-09-30 |