Title:
TWO-AXIS POSITIONING DEVICE
Document Type and Number:
Japanese Patent JPS59123907
Kind Code:
A
Abstract:
PURPOSE:To realize high accuracy and high reliability, to prevent generation of discordance and to give high-speed and high-acceleration capacity by using a linear type motor as an actuator without using a transmitting mechanism of rotation-linear movement conversion. CONSTITUTION:X-axis movable elements 12, 14 of the first and second X-axis linear servo motors move linearly along X-axis guide stator members 11, 13. The Y-axis movable element 16 of a Y-axis linear motor having both ends provided in movable elements 12, 14 and moves in the direction of X-axis with the movable elemtns 12, 14 moves linearly along a Y-axis guide stator member 15. The members 11, 13 forms plural magnetic pole teeth 31 along the direction of X-axis, and the member 16 forms the pole teeth along the direction of Y-axis. Groups 32a, 32b of pole teeth excited by exciting windings are provided on the faces opposing to pole teeth of members 11, 13, 15 in the movable elements 12, 14, 16. The pole teeth 31 of members 11, 13, 15 are detected by position detecting sensors 17, 18, 19, and positional signals of different phases are generated.
Inventors:
SUGIZAKI TAIJI
WAKABAYASHI NORIAKI
ONODERA HIROMI
YAMADA KIICHIROU
WAKABAYASHI NORIAKI
ONODERA HIROMI
YAMADA KIICHIROU
Application Number:
JP23148982A
Publication Date:
July 17, 1984
Filing Date:
December 29, 1982
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
G05D3/00; G01B21/00; G05D3/12; (IPC1-7): G01B21/00; G05D3/12
Attorney, Agent or Firm:
Yoshihiro Morimoto