Title:
FERROELECTRIC THIN FILM
Document Type and Number:
Japanese Patent JPS5935098
Kind Code:
A
Abstract:
PURPOSE:To improve the electro-optical effect of a ferroelectric thin film for opto-electronic use composed of oxides of Pb, Ti and La, by setting the molar ratio of Pb to Ti within a specific range. CONSTITUTION:Powdery oxides of Pb, Ti and La are mixed together, calcined, and sputtered by using the powder as the target to form a thin film on a substrate such as the C-face of sapphire. In the above process, the molar ratio of Pb to Ti is adjusted to 0.65
Inventors:
ADACHI HIDEAKI
OUCHI KENZOU
KAWAGUCHI TAKAO
SETSUNE KENTAROU
WASA KIYOTAKA
OUCHI KENZOU
KAWAGUCHI TAKAO
SETSUNE KENTAROU
WASA KIYOTAKA
Application Number:
JP14251882A
Publication Date:
February 25, 1984
Filing Date:
August 17, 1982
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
C04B35/46; C30B23/02; C30B23/08; C30B29/22; C30B29/32; H01B3/12; (IPC1-7): C04B35/48; C30B23/00; C30B29/22; H01B3/12
Attorney, Agent or Firm:
Akira Kobiji (2 outside)