Title:
DEVICE FOR FORMING LINEAR PATTERN
Document Type and Number:
Japanese Patent JPS6118156
Kind Code:
A
Abstract:
The formation of lines (2) of the order of 0,8 nanometers wide is achieved using a tunneling current through a gas (6) that changes to provide a residue that is the basis of the line (2). The tunneling current energy is tuned to the energy required to dissociate the gas (6). The radius of the tunnel tip (3) and the tip (3)-to-substrate (1) distance (S) are of the order of less than ten nanometers.
Inventors:
GERUDO KAARU BININGU
RANDOORU MEINDAATO FUIINSUTORA
RODONII TOREBUAA HOJISON
HAINRITSUHI ROORAA
JIERII MATSUKU FUAASON UTSUDOO
RANDOORU MEINDAATO FUIINSUTORA
RODONII TOREBUAA HOJISON
HAINRITSUHI ROORAA
JIERII MATSUKU FUAASON UTSUDOO
Application Number:
JP8151785A
Publication Date:
January 27, 1986
Filing Date:
April 18, 1985
Export Citation:
Assignee:
IBM
International Classes:
H01L21/3205; C23C16/04; H01J37/317; H01J37/32; (IPC1-7): H01L21/88
Attorney, Agent or Firm:
Jiro Yamamoto