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Title:
METHOD OF GENERATING POSITIVE ELECTRONIC RESIST VIDEO WITH HIGH SENSITIVITY
Document Type and Number:
Japanese Patent JPS5858734
Kind Code:
A
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Inventors:
JIYUEI EICHI REI
RICHIYAADO DAGURASU
ROIDO SHIEFUAADO
Application Number:
JP7647582A
Publication Date:
April 07, 1983
Filing Date:
May 07, 1982
Export Citation:
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Assignee:
HONEYWELL INC
International Classes:
H01L21/027; G03F7/039; G03F7/16; (IPC1-7): H01L21/30
Domestic Patent References:
JPS485843A
JPS52153671A1977-12-20
JPS5376826A1978-07-07
JPS5381114A1978-07-18
Attorney, Agent or Firm:
Masaki Yamakawa (2 outside)



 
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