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Title:
ELECTRON BEAM CURRENT CONTROL DEVICE
Document Type and Number:
Japanese Patent JPS58188042
Kind Code:
A
Abstract:

PURPOSE: To prevent the beam irradiation work from being interrupted by negating a bias voltage increasing signal to be output from a servo-amplifier at the moment when the primary side current is rapidly increased so as to finish the discharge between a control grid and the negative pole by single shot.

CONSTITUTION: When a discharge is generated between a control grid 4 and the negative pole 3, a beam current is increased by said discharge so that a detection signal positive from a beam current detecting resistor 15 is increased while a servo-amplifier 19 tends to make a signal for raising the bias voltage for a control element 18. Then, the primary current of a bias insulation transformer 11 increases at the same time so that said increasing signal negative is supplied to the servo-amplifier 19 through a detection transformer 51, a rectifier 52, a comparator 53 differentiator (resistor 54 and capacitor 55), a waveform shaping diode 56 and an input resistor 58 while negating an upward action of the bias voltage.


Inventors:
TSUKAMOTO SEIICHI
Application Number:
JP7087182A
Publication Date:
November 02, 1983
Filing Date:
April 27, 1982
Export Citation:
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Assignee:
NIPPON ELECTRIC CO
International Classes:
H01J37/30; H01J37/24; (IPC1-7): H01J37/30
Attorney, Agent or Firm:
Uchihara Shin



 
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