PURPOSE: To improve the quality and reliability by installing a cantilever beam which deforms according to the (inter-atomic force working between a diamond stylus and a sample.
CONSTITUTION: A cantilever beam 120 whose one end is supported in a supporting part 140, a stylus holding part 160 fixed on the other end part of the cantilever beam 120 bar an adhesive 130, and a diamond stylus 110 a part of which is buried and fixed in the stylus holding part 160 are installed. The one end which is supported by the supporting par 140 of the cantilever beam 120 becomes a fixed end and the other end in which the stylus holding part 160 is fixed becomes a free end and is deformed according to the atomic inter- force working between the diamond stylus 110 and the sample. Consequently, a cantilever 100 with high quality and high reliability is obtained.
YASUE TAKAO
KOYAMA HIROSHI
