PURPOSE: To vapor-deposit a ferromagnetic material efficiently by arranging a small rotating roller adjacently to a can so that the lowermost outer circumferential point of the small roller is higher than the lowermost outer circumferential point of the can, and extending a flexible endless belt between the can and small roller.
CONSTITUTION: When a tape type base body 2 from a pay-off roller is conveyed by the flexible endless belt 27 extended from the can 21 to the small roller 26, a vaporized beam 24 of the ferromagnetic material from a vaporization source 23 arranged at a lower position reaches the tape type base 22 which moves in an area where the beam is not cut off by a slanting mask 25, and cosequently the ferromagnetic material is vapor-deposited slantingly. In this case, the vaporized beam 24 corresponding to an angle β among vapors radiated from the vaporization source 23 is vapor-deposited, but the angle β is larger than that of a conventional device. Therefore, the efficiency of vapor deposition is improved extremely.
SEKINE MASARU
AKASHI GOROU
