Title:
【考案の名称】真空バルブの真空不良検出装置
Document Type and Number:
Japanese Patent JPS60160437
Kind Code:
U
Inventors:
Tadashi Hashimoto
Eiji Kaneko
Toru Tamagawa
Eiji Kaneko
Toru Tamagawa
Application Number:
JP4700784U
Publication Date:
October 25, 1985
Filing Date:
March 31, 1984
Export Citation:
International Classes:
G01R31/327; G01L21/00; G01R31/333; H01H33/66; (IPC1-7): H01H33/66; G01L21/00; G01R31/32