PURPOSE: To enhance photoresponsivity, repetition stability, and uniformity of the interface betwee an electrostatic charge generating layer and a charge transfer layer by depositing a thin crystalline zinc oxide film on a conductive substrate by sputtering, etching its surface, and laminating the charge generating layer and the charge transfer layer.

CONSTITUTION: The thin crystalline zinc oxide film is deposited on the conductive substrate 1 by sputtering, and this film is etched by assisting plasma to form a finely roughened thin zinc oxide film 2 on the surface. On this film 2 a dye sensitizer layer 3 is attached to form the charge generating layer 5 together with the film 2. Finally, the charge transfer layer 4 is formed. The film 2 may be etched chemical etching or electron beam irradiation etching. As a result, the obtained electrophotographic sensitive body can be enhanced in photoresponsivity, repetition stability, and uniformity of the interface between the charge generating layer and the charge transfer layer.