Title:
トモグラフィック・イメージング方法
Document Type and Number:
Japanese Patent JP7007136
Kind Code:
B2
Abstract:
A method of investigating a specimen using tomographic imaging, comprising the following steps:
- Providing a specimen on a specimen holder;
- Directing a beam of radiation through the specimen and onto a detector, thereby generating an image of the specimen;
- Repeating said directing step for a set of different specimen orientations relative to said beam, thereby generating a corresponding set of images;
- Using an iterative mathematical reconstruction technique to convert said set of images into a tomogram of at least a portion of the specimen;
- Mathematically constraining said reconstruction, so as to curtail a solution space resulting therefrom,
additionally comprising the following steps:
- Obtaining three-dimensional SEM imagery of at least a part of the specimen that overlaps at least partially with said portion;
- Using said SEM imagery to perform said constraining step, by requiring iterative results of said reconstruction to be consistent with pixel values derived from said SEM imagery.
Inventors:
Remuko Shoen Macels
Pavel Potzek
Pavel Potzek
Application Number:
JP2017161697A
Publication Date:
January 24, 2022
Filing Date:
August 25, 2017
Export Citation:
Assignee:
FEI COMPANY
International Classes:
H01J37/22; G01N23/044; G01N23/046
Domestic Patent References:
| JP2012022922A | ||||
| JP2011525271A | ||||
| JP2014107274A |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Shinsuke Onuki
Tadahiko Ito
Shinsuke Onuki