To provide a tool for fine machining capable of forming a fine groove having width and depth of ≤100μm on the surface of an object to be machined made of a brittle material such as glass or ceramics, in fine machining of a chip for micro reaction system or the like, and a fine machining method for the brittle material using the tool for fine machining.
In the tool, a hard carbon film 5 is coated at a tip part 4 formed in a tool body 1, film thickness t of the hard carbon film 5 is made larger than an outer diameter d at a distal end of the tip part 4, and a cutting blade part 6 having a surface formed into a substantially projecting curved surface shape is formed at the distal end of the tip part 4 by the hard carbon film 5. By delivering the tool body 1, while rotating the tool body 1 around a center line O of the tip part 4, by using the tool, the fine machining is performed for the surface of the object to be machined made of the brittle material by the cutting blade part 6.
| JPH08155947A | 1996-06-18 | |||
| JP2003205410A | 2003-07-22 | |||
| JPH045367U | 1992-01-17 | |||
| JP2000033573A | 2000-02-02 | |||
| JPH10138027A | 1998-05-26 | |||
| JPH06114629A | 1994-04-26 |
Tadashi Takahashi
Masakazu Aoyama
Yasuhiko Murayama
Noriko Yanai
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