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Title:
TOOL FOR MANUFACTURING DIAMOND FILM COATED SEMICONDUCTOR
Document Type and Number:
Japanese Patent JP2005212076
Kind Code:
A
Abstract:

To provide a tool for manufacturing a diamond film coated semiconductor for machining lead wire of a semiconductor device, etc. capable of suppressing damage due to static electricity of the semiconductor device at the time of machining by preventing electrostatic charge of the tool.

In this tool, a diamond film is coated on the surface of a base material. The base material is cemented carbide or cermet. The diamond film has outermost layer and inner layer. The outermost layer of the diamond film is a conductive diamond film containing boron. The outermost layer and the base material are electrically connected. Average surface roughness of the outermost layer is ≤0.2μm in Ra, and an average particle size of diamond crystal particles in the outermost layer is made ≤1.5μm.


Inventors:
Kazahaya, Katsuo
Matsumoto, Yasushi
Fukunishi, Toshio
Seki, Yuichiro
Imai, Takahiro
Application Number:
JP2004000024762
Publication Date:
August 11, 2005
Filing Date:
January 30, 2004
Export Citation:
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Assignee:
ALLIED MATERIAL CORP
SUMITOMO ELECTRIC IND LTD
International Classes:
B26D1/38; B21D28/00; B21D28/14; B21D37/01; H01L23/50; B26D1/01; B21D28/00; B21D28/14; B21D37/01; H01L23/48; (IPC1-7): B26D1/38; B21D37/01; H01L23/50



 
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