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Patent Searching and Data


Title:
TOP RING CONTROL DEVICE
Document Type and Number:
Japanese Patent JP2000033551
Kind Code:
A
Abstract:

To provide a top ring control device capable of detecting an abnormality when an object to be polished is polished by a top ring speedily and securely and corresponding to it properly.

This top ring control device is provided with an air cylinder 52 pressing a top ring 11 against a turn table, a load cell 75 detecting a pressing pressure of the top ring 11 against the turn table, and a control means 80 which controls a pressing pressure of the top ring 11 against the turn table by the air cylinder 52 so that the detected pressure value becomes a predetermined specified pressure value, judges that an abnormality occurs when a condition in which the detected pressure value exceeds the predetermined specified value continues for more than predetermined time, and stops the operation for polishing an object to be polished by the top ring 11.


Inventors:
TOGAWA TETSUJI
TAKADA NOBUYUKI
Application Number:
JP20513798A
Publication Date:
February 02, 2000
Filing Date:
July 21, 1998
Export Citation:
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Assignee:
EBARA CORP
International Classes:
B24B37/005; B24B49/16; B24D15/02; (IPC1-7): B24B37/00
Attorney, Agent or Firm:
Takashi Kumagai (1 outside)