Title:
基体の表面に対するトポグラフィ装置
Document Type and Number:
Japanese Patent JP2013500462
Kind Code:
A
Abstract:
A device for analyzing the topography of a surface (2) of a substrate (1) travelling on a substantially planar course with axes X, Y and Z defining an orthonormal frame of reference of the space. The surface (2) is substantially parallel to the plane XY. A device (10) for structured lighting of the surface (2) engages with a device (20) for measuring light backscattered by the surface (2) in order to analyze topography of the surface(2) during travel of the substrate (1). The lighting device (10) projecting a light beam (F) with an angle of incidence ‘a’ onto the surface (2), to form a plurality ‘n’ of luminous streaks (S1, S2, . . . Sn) thereon. Each luminous streak (S) forms an angle ‘b’ with the axis X1. The measurement device (20) includes a linear camera located in a plane P secant to the plane XY and the plane XZ, the intersection of the plane P with the plane XY forming angles.
Inventors:
Pirou Francis
Richard Mathieu
Rose Benoit
Richard Mathieu
Rose Benoit
Application Number:
JP2012520938A
Publication Date:
January 07, 2013
Filing Date:
July 16, 2010
Export Citation:
Assignee:
BOBST S.A.
International Classes:
G01B11/25; B31B50/88; G01N21/88
Domestic Patent References:
| JPS61202128A | 1986-09-06 | |||
| JP2003300260A | 2003-10-21 | |||
| JP2006258438A | 2006-09-28 | |||
| JP2009031150A | 2009-02-12 | |||
| JP2000275186A | 2000-10-06 | |||
| JP2009036589A | 2009-02-19 | |||
| JPS5690205A | 1981-07-22 | |||
| JP2006064590A | 2006-03-09 |
Attorney, Agent or Firm:
Koichi Tsujii
Sadao Kumakura
Disciple Maru Ken
Ino Sato
Mitsuru Matsushita
Ichiro Kurasawa
Hiroko Suzuki
Sadao Kumakura
Disciple Maru Ken
Ino Sato
Mitsuru Matsushita
Ichiro Kurasawa
Hiroko Suzuki