Title:
トロイダル・プラズマ・チャンバ
Document Type and Number:
Japanese Patent JP4608583
Kind Code:
B2
Abstract:
The invention provides a downstream plasma source (10) comprising:a. a plasma chamber (20;100) having at least one side exposed to a process chamber (22) having a material disposed therein;b. a transformer (12) having a magnetic core (16) surrounding a portion of the plasma chamber and a primary winding (18);c. a gas inlet (118) for providing a feed gas to the plasma chamber; andd. an AC switching power supply (250) having an output (28) coupled to the primary winding, the AC switching power supply driving an AC current in the primary winding, the AC current inducing an AC potential inside the plasma chamber that directly forms a toroidal plasma (14) that completes a secondary circuit of the transformer and dissociates the feed gas, the dissociated feed gas and charged particles generated by the plasma flowing into the process chamber for processing the material disposed therein.
Inventors:
Smith, Donald Kay.
Chen, Jin
Holber, William M.
Georgia, eric
Chen, Jin
Holber, William M.
Georgia, eric
Application Number:
JP2009106092A
Publication Date:
January 12, 2011
Filing Date:
April 24, 2009
Export Citation:
Assignee:
MKS INSTRUMENTS,INCORPORATED
International Classes:
H05H1/46; B01J19/08; H01J27/16; H01J37/32; H01L21/205; H01L21/302; H01L21/3065
Domestic Patent References:
| JP10508985A | ||||
| JP60056298U | ||||
| JP7176524A | ||||
| JP60048195U |
Foreign References:
| US4431898 |
Attorney, Agent or Firm:
Shinjiro Ono
Kazuo Shamoto
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Kazuo Shamoto
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita