Title:
TORSIONAL VIBRATOR AND OPTICAL DEFLECTOR
Document Type and Number:
Japanese Patent JP3003429
Kind Code:
B2
Abstract:
PURPOSE: To enable stable operation with small-sized and inexpensive constitution.
CONSTITUTION: A second torsion vibrator 3 consisting of an outside frame part 31 and a second torsion spring 32 is formed on the outer side of a first torsional vibrator 2 consisting of a pair of torsion springs 22 and a planar member (reflection mirror) 21. This second torsional vibrator 3 is fixed by a fixing part 4. The resonance frequency of the first torsional vibrator 2 is set higher than the resonance frequency of the second torsional vibrator 3 and the outside frame part 31 of the second torsional vibrator 3 is driven by magnetic attraction or electrostatic attraction near the resonance frequency of the first torsional vibrator so that a large displacement or scanning angle is stably obtd. by small driving force. Fig. shows an example in which the one way magnetic attraction or electrostatic attraction is applied to the outside frame part 31 and the application of force couple thereto in place of the above- mentioned attraction is possible as well.
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Inventors:
Wataru Nakagawa
Toruhiko Tsuruoka
Satoshi Sakagami
Toruhiko Tsuruoka
Satoshi Sakagami
Application Number:
JP29183992A
Publication Date:
January 31, 2000
Filing Date:
October 30, 1992
Export Citation:
Assignee:
Fuji Electric Co., Ltd.
International Classes:
B81B3/00; G02B26/08; B25J7/00; G02B26/10; G06K7/10; (IPC1-7): G02B26/10; B25J7/00
Attorney, Agent or Firm:
Kiyoshi Matsuzaki
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