PURPOSE: To provide a titled total reflection mirror that has high stability and permits regeneration by washing by using a carbon protective film as a protective film to be formed on a laser light reflection layer having high reflectance.
CONSTITUTION: An adhesion intensifying layer 4 of any selected among chromium, tungsten, and nickel, then a laser light reflection layer 2 selected from a high reflection metal group of gold, silver, copper and aluminum, and further carbon of 100W1,000 angstrom thickness as a protective film 5 are formed successively by a vacuum deposition method on a base plate 1 of copper, silicon or electroless nickel plating polished to a specular surface. If the film 5 is thinner than 100 angstrom, the island-like films are formed. If the thickness exceeds 1,000 angstrom, the absorption of laser light increases, and the deformation in the shape of the reflecting mirror and the decrease in the reflectance thereof by the effect of heat, hence the degradation in performance are resulted.
HONMA MASAMI
MIYATA TAKEO
