PURPOSE: To provide a touch signal probe whose detection sensitivity is good irrepective of a contact region in a contact part.
CONSTITUTION: A piezoelectric element 26 is attached to a nearly column-shaped vibrator 24 provided with a contact part 28A in such way that it is vibrated back and forth simultaneously in two directions in its axial direction and an axial rotation direction around the axial direction. When the axial direction of the vibrator 24 is at right angles to the face, to be measured, of an object to be measured, the restraint of the vibration of the contact part 28A plays a large role in the detection of the contact part 28A. When the axial direction of the vibrator 24 is parallel to the face to be measured, the restraint of the vibration in the axial rotation direction of the contact part 28A mainly plays a parge role in the detection of the contact part. Consequently, a contact angle can be found on the basis of a change in vibrations in two directions in a contact operation, and a tough sensor which does not depend on the contact angle can be realized when a correction by the contact angle is executed.
HIDAKA KAZUHIKO
HAMA ARITSUNE
TERAGUCHI MIKIYA
MARUMO CHIHIRO
OKAMOTO KIYOKAZU
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